Yep. The installation manual for the pitot tube has several links to builders' sites with details on this. Biggest caution is *don't drill into the pitot and AOA tubes inside the pitot tube itself*.
Yes, 6/32 is the go.
I drilled the mast first, then inserted the pitot tube in and marked it.
Then drill the pitot tube in a drill press.
It's a bit fiddly to get the hole angles correct, but as mentioned above, there is lots of good info around.